Inventor Name
Manasevit, Harold M.
Repository
Chemical Heritage Foundation
Othmer Library
315 Chestnut St.
Philadelphia, PA 19106
http://othmerlib.chemheritage.org
Physical Description
1 box
Summary
Collection deals with Dr. Manasevit's work in Metalorganic Chemical Vapor Deposition (MOCVD) as applied to Silicon Heteroepitaxy and Gallium Arsenide. Other topics include Gas Phase Etching of Sapphire with Sulfur Fluorides and PbTe and PbSnTe Films. Dr. Manasevit received his B.S. Degree in Chemistry from Ohio University in 1950, his M.S. in Chemistry from Pennsylvania State University in 1951 and his Ph.D. in Physical Inorganic Chemistry from the Illinois Institute of Technology in 1959. Dr. Manasevithas been involved with Chemical Vapor Deposition (CVD) of materials for over thirty years and has developed numerous CVD techniques for etching insulators and for producing semiconductor and superconducting films on insulators. A total of 16 patents have been issued to Dr. Manasevit and is the author or co-author of over 50 technical publications.
Finding Aid
http://othmerlib.chemheritage.org/search/?searchtype=a&searcharg=manasevit
